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저자 Yohan Choi, Moon-kyu Sung, Sang Hyun Lee, Jee-Hyong Lee, Jin-Hong Park, Ji-Hyun Choi, Sung-Yong Moon, Sung-Yoon Choi, and Woo-Sung Han 
학회명 The International Society for Optical Engineering 
학회명 (약자) SPIE 2005 
pp. 1017-1023 
학회시작일 2005-04-13 
학회종료일 2005-04-15 
비고  

Defect-free mask is a dream of mask makers. Repair technology [1] that removes defects on Att. PSM is getting more attentions than ever. Therefore the fast and precise verification of repaired results is highly required. Most confirmation methods are carried out by using the inspection system because it is faster than AIMS to verify the repaired results. However, the accuracy of the verification using the inspection system cannot be compared to it with AIMS in the view of printability. In this paper, the results of optical simulation using top-down repair image are compared with those of AIMS for rapid confirmation of repaired results with competitive accuracy. Also, neural network which can compute the complex non-linear relationships easily are used to increase the accuracy of repair simulation.

    2012

      Implementation of a Context-Awareness Framework for Ubiquitous Computing Environment
      2012.03.19
      저자: Hyun-Jung Park, Taebok Yoon, and Jee-Hyong Lee     학회명: Joint 3rd International Conference on Soft Computing and Intelligent Systems and 7th International Symposium on advanced Intelligent Systems     학회명 (약자): SCIS&ISISI 2006     pp.: 479     학회시작일: 2006-09-20     학회종료일: 2006-09-24    
      Decision Tree Algorithm Improved with a Time-weighted Entropy
      2012.03.19
      저자: LiQuan Dong, Taebok Yoon, Jee-Hyong Lee, and Keon Myung Lee     학회명: Joint 3rd International Conference on Soft Computing and Intelligent Systems and 7th International Symposium on advanced Intelligent Systems     학회명 (약자): SCIS&ISISI 2006     pp.: 235     학회시작일: 2006-09-20     학회종료일: 2006-09-24    
      Chip Level Lithography Verification System with Artificial Neural Networks
      2012.03.19
      저자: Jaepil Shin, Jinsuk Choi, Dae-Hyun Jung, Jee-Hyong Lee, Moon-Hyun Yoo, and Jung-Taek Kong     학회명: The International Society for Optical Engineering     학회명 (약자): SPIE 2005     pp.: 124-130     학회시작일: 2005-04-13     학회종료일: 2005-04-15    
      Repair simulation with image processing and artificial intelligence
      2012.03.19
      저자: Yohan Choi, Moon-kyu Sung, Sang Hyun Lee, Jee-Hyong Lee, Jin-Hong Park, Ji-Hyun Choi, Sung-Yong Moon, Sung-Yoon Choi, and Woo-Sung Han     학회명: The International Society for Optical Engineering     학회명 (약자): SPIE 2005     pp.: 1017-1023     학회시작일: 2005-04-13     학회종료일: 2005-04-15    
      FPGA based Dynamic Thresholding Circuit
      2012.01.18
      저자: J. U. Cho, S. H. Lee, J. W. Jeon, J. T. Kim, J. D. Cho, K. M. Lee, J. H. Lee     학회명: International Conference on Computational Science and Its Applications     학회명 (약자): ICCAS 2004     pp.: 1235-1238     학회시작일: 2004-08-25     학회종료일: 2004-08-27    
      An SoC-Based Context-Aware System Architecture
      2012.01.17
      저자: Keon Myung Lee and Jee-Hyong Lee     학회명: Knowledge-Based Intelligent Information and Engineering Systems     학회명 (약자): KES 2004     pp.: 573-580     학회시작일: 2004-05-16     학회종료일: 2004-05-18    
      A Method for Ranking Fuzzily Fuzzy Members
      2012.01.17
      저자: Jee-hyong Lee, Hyung Lee-Kwang     학회명: IEEE International Conference on Fuzzy Systems     학회명 (약자): FUZZ IEEE 2000     pp.: 462-465     학회시작일: 2000-05-07     학회종료일: 2000-05-10