본문 바로가기

쓰기

 
저자 W.R. Lee, J.H. Lee, K.H. You 
논문지 Precision Engineering 
Vol. 35 
No.
pp. 521-524 
게재일 2011-03-10 

In this study, we designed an augmented robust controller for an ultra-precision positioning system. The control algorithm includes modified sliding-mode control with a new switching surface and linear quadratic (LQ) control for optimal feedback gain. A nanometric scale positioning system is especially vulnerable to parameter uncertainties and external disturbances. To solve this problem, we propose an augmented system that adopts two auxiliary states: state estimates and control input. We demonstrated the robust performance of the proposed control algorithm through a comparison with LQ control.

    2016

    2015

    2014

    2013

    2012